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Brooks Instrument XacTorr® Series Capacitance Manometers

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Product Overview

The XacTorr Series digital vacuum capacitance manometers from Brooks boast industry leading features that improve measurement reliability, reduce drift, avoid diaphragm contamination and minimize thermal effects. Models in this series include; CMX0, CMX1, CMX2, CMX3. For more information about the XacTorr series capacitance manometers, contact a Cross process solutions expert or take a look at further information below.

Features and Benefits

Available for process ranges from 0.10 Torr to 1000 Torr

Multiple accuracy levels available

Patented Mark IV sensor

Digital architecture enables operation over a wide dynamic range with extremely good accuracy

Dual-zone temperature control improves measurement stability and repeatability

Multi-decade digital calibration provides superior window of known accuracy

Intelli-touch zero adjustment

Independent & easily accessible diagnostic service port

DeviceNet® and analog communication options

Lower drift, superior protection from deposition of process gases

Elimination of manual potentiometers and drift associated with electronics

Fast warm-up, close temperature control, rapid response to changes



  • CMX0 Ambient
  • CMX1 45°C
  • CMX2 100°C
  • CMX3 160°C

Pressure Range:

  • 0.1, 1, 2, 10, 20, 100, 1000 Torr
  • mBar & Pascal References Available


  • CMX0: 0.25% of Reading
  • CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading
  • CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading

Measurement Range: 4 Decades

Temperature Effect:

  • On Zero: 0.002% FS / °C
  • On Span: 0.02% FS / °C

Available In The Following Areas

With an extensive background in a variety of industries, Cross has relationships with a number of leading brands, including exclusive distributorships in some areas. We are proud to offer Brooks Instrument in the following areas:

See How A Solution From Brooks Instrument Can Benefit Your Operation

Contact our Team

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In the meantime, enjoy these fun facts…

Did you know… Cross Company is an ESOP (Employee Stock Ownership Plan). Our ESOP started in 1979 and as of 2006, we are 100% employee-owned! Learn more about our ESOP and how that benefits both team members and our customers.
Did you know... the precision measurement group at Cross was founded in 1939 by our current CEO's grandfather, Jim King. That's a whole lot of calibration!
Did you know... A fingerprint weighs about 50 micrograms. We know, we weighed it! The residue left from a finger can actually make a difference in weight results which is why we wear gloves when we calibrate weights. For reference, a sheet of paper is about 4.5 grams, that’s 4.5 million micrograms.
Did you know… Cross Company has grown significantly since our start in 1954. Over the years we've acquired 26 companies! Today, our five groups have expertise in everything from industrial automation to precision measurement, and industry knowledge going all the way back to 1939.