Brooks Instrument XacTorr® Series Capacitance Manometers
Product Overview
The XacTorr Series digital vacuum capacitance manometers from Brooks boast industry leading features that improve measurement reliability, reduce drift, avoid diaphragm contamination and minimize thermal effects. Models in this series include; CMX0, CMX1, CMX2, CMX3. For more information about the XacTorr series capacitance manometers, contact a Cross process solutions expert or take a look at further information below.
Features and Benefits
Available for process ranges from 0.10 Torr to 1000 Torr
Multiple accuracy levels available
Patented Mark IV sensor
Digital architecture enables operation over a wide dynamic range with extremely good accuracy
Dual-zone temperature control improves measurement stability and repeatability
Multi-decade digital calibration provides superior window of known accuracy
Intelli-touch zero adjustment
Independent & easily accessible diagnostic service port
DeviceNet® and analog communication options
Lower drift, superior protection from deposition of process gases
Elimination of manual potentiometers and drift associated with electronics
Fast warm-up, close temperature control, rapid response to changes
Specifications
Temperature:
- CMX0 Ambient
- CMX1 45°C
- CMX2 100°C
- CMX3 160°C
Pressure Range:
- 0.1, 1, 2, 10, 20, 100, 1000 Torr
- mBar & Pascal References Available
Accuracy:
- CMX0: 0.25% of Reading
- CMX1, CMX2: 1 to 1000 Torr Ranges = 0.15% of Reading
- CMX1, CMX2: < 1 Torr Ranges = 0.25% of Reading
Measurement Range: 4 Decades
Temperature Effect:
- On Zero: 0.002% FS / °C
- On Span: 0.02% FS / °C
Available In The Following Areas
With an extensive background in a variety of industries, Cross has relationships with a number of leading brands, including exclusive distributorships in some areas. We are proud to offer Brooks Instrument in the following areas:
More information From Brooks Instrument
Interested in learning more? Contact a Cross team member today to discuss your application and see how we can help your operation!
