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GF40 Series Elastomer Sealed Thermal Mass Flow Controllers and Meters

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Product Overview

Brooks Instrument GF40 Series elastomer sealed mass flow controllers and meters offer extensive flexibility and productivity with the ability to handle multiple gases in one device. In addition, utilizing Brooks Instrument’s exclusive MultiFlo™ technology, the GF40 series is the perfect option for processes that either use a variety of gases, change gas types frequently, or need to re-range while preserving gas measurement and control accuracy. The Brooks Instrument GF40 enables a new level of process flexibility combined with unprecedented flow measurement and control performance.

For more information about Brooks Instrument GF40 Series Elastomer Sealed Thermal Mass Flow Controllers and Meters, contact a Cross flow and safety technologies expert or take a look at some highlighted details below.

Features and Benefits

Take a look at some of the features and benefits of the GF40 Series

Programmable multi-gas/multi-range capabilities

Brooks® MultiFlo™ gas database contains thousands of native gas runs to establish correction functions

Sub-1 second flow response time and accuracy of 1% set point for demanding applications

Well suited for a variety of gases

Fast response, Hastelloy sensor

Easily accessible diagnostic service port is independent of tool communication

Multi-protocol communication options include DeviceNet™, EtherCAT®, Profibus® and RS-485 analog interface

MultiFlo™ technology enables new gas calibrations and full-scale ranges without removing the MFC from the gas line, maximizing process uptime

MultiFlo™ programming is simple and user-friendly; new gas can be selected in under 60 seconds

OEMs and large end users can greatly reduce the number of gas and range-specific controllers they inventory

Excellent process gas accuracy backed by superior metrology systems and calibration based on global standards

Corrosion-resistant sensor provides unmatched long-term stability ensuring maximum yield and throughput


For full specifications, including electrical, diagnostics, and compliance information, download the product specification sheet below.


Flow Range (Full Scale Capacity): .3 sccm – 50 slpm

  • Standard: ± 2% reading, ± 0.5% full scale
  • Optional: ± 1% reading, ± 0.5% full scale

Accuracy (Pressure): 1% of SP 35-100%, 0.35% of FS 2-35%

Repeatability: 0.20% SP

Flow Temperature Coefficient: ±0.1% of FS per °C

Linearity: ±0.5% FS (included in accuracy)

Response Time: Normally Closed Valve: 300 ms – <1 sec

Multi-Gas and Range Configurability: MultiFlo™ Available

Control Range: 2-100%

Number of Bins: 10 Bins

Valve Shut Down: Closes valve when set point drops below 1.5% full scale

Zero Stability: <±0.5% FS per year

Pressure Coefficient: 0.03% per psi (0-50psi N2)


Seal Material: Elastomer

Surface Finish: 32µ inch Ra

Wetted Materials:

  • 316L Stainless Steel
  • Hastelloy C-22
  • 1707 PH
  • 43055

Valve Options:

  • Normally Closed
  • Normally Open
  • Meter (no valve)


Temperature Range: 5-50oC (41-122oF)

Max Pressure: 150 psig/10 bar

Differential Pressure Range:

  • 3-860 sccm = 7-45 psid
  • 861-7200 sccm = 15-45 psid
  • 7201-55000 sccm = 25-45 psid

*Contact Brooks Technical Support for more information.

Leak Integrity: 1×10-10 atm cc/sec He

Available In The Following Areas

With an extensive background in a variety of industries, Cross has relationships with a number of leading brands, including exclusive distributorships in some areas. We are proud to offer Brooks Instrument in the following areas:

See How A Solution From Brooks Instrument Can Benefit Your Operation

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In the meantime, enjoy these fun facts…

Did you know… Cross Company is an ESOP (Employee Stock Ownership Plan). Our ESOP started in 1979 and as of 2006, we are 100% employee-owned! Learn more about our ESOP and how that benefits both team members and our customers.
Did you know... the precision measurement group at Cross was founded in 1939 by our current CEO's grandfather, Jim King. That's a whole lot of calibration!
Did you know... A fingerprint weighs about 50 micrograms. We know, we weighed it! The residue left from a finger can actually make a difference in weight results which is why we wear gloves when we calibrate weights. For reference, a sheet of paper is about 4.5 grams, that’s 4.5 million micrograms.
Did you know… Cross Company has grown significantly since our start in 1954. Over the years we've acquired 26 companies! Today, our five groups have expertise in everything from industrial automation to precision measurement, and industry knowledge going all the way back to 1939.