100% Employee Owned, Founded 1954

Precise Control of Gas Delivery for Liquid and Solid Precursors

Provider Resource

Precise Control of Gas Delivery for Liquid and Solid Precursors 1

In semiconductor manufacturing, transistors have evolved significantly over the years, from planar device architectures to FinFETS and now Gate-All-Around (GAA) to help support the development of various process nodes. These developments often demand novel precursors to support manufacturability. Accurate and repeatable delivery of precursors is critical to wafer performance, uniformity, and yield as the semiconductor industry embarks on leading-edge technology nodes.

This application note from from Brooks Instrument, highlights requirements and benefits of mass flow controllers and pressure controllers in this process. In addition, they write about the three most common methods of liquid and solid precursor delivery; bubbler systems, vapor draw systems, and direct liquid injection (or DLI) systems. Take a look at the full application note: Precise Control of Gas Delivery for Liquid and Solid Precursors.

The experts at our process solutions group have a long standing history of working with Brooks Instrument and can help your team determine which equipment is best for you operation. Take a look at the application note and contact our team to see how we can improve your operation.

GF Series Elastomer Sealed Thermal Mass Flow Controller and Meter

See How Our Process Solutions Team Can Help Improve Quality, Increase Efficiency, And Reduce Risk In Your Operation

Related Posts

Take a look at WIKA’s latest white paper and offering for wastewater instruments and technology. This writeup discusses the water treatment process, including; preliminary
January 23, 2023

Hang Tight! We're Searching... Searching... Searching...

We’re looking through thousands of pages to find the most relevant information.

In the meantime, enjoy these fun facts…

Did you know... the precision measurement group at Cross was founded in 1939 by our current CEO's grandfather, Jim King. That's a whole lot of calibration!
Did you know... A fingerprint weighs about 50 micrograms. We know, we weighed it! The residue left from a finger can actually make a difference in weight results which is why we wear gloves when we calibrate weights. For reference, a sheet to paper is about 4.5 grams, that’s 4.5 million micrograms.
Did you know… Cross Company is an ESOP (Employee Stock Ownership Plan). Our ESOP started in 1979 and as of 2006, we are a 100% employee owned! Learn more about our ESOP and how that benefits both team members and our customers.
Did you know… Cross Company has grown significantly since our start in 1954. Over the years we've acquired 26 companies! Today, our five groups have expertise in everything from industrial automation to precision measurement, and industry knowledge going all the way back to 1939.