Brooks Instrument Application: Gas and Liquid Feed Delivery for Titanium Nitride Coatings

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Gas and Liquid Feed Delivery for Titanium Nitride Coatings

Did you know? The CVD (Chemical Vapor Deposition) process is commonly used to create titanium nitride coatings. In this process, several chemicals (TiC14, N2 and H2) are fed into a furnace where they react at an elevated temperature to create TiN, which deposits on the surfaces as a coating. Due to its golden appearance TiN coatings are often used on jewelry, household fixtures and automotive trim for decorative purposes. Similar coatings are also used as a non-toxic surface for medical devices and equipment. These types of coatings are now also being applied in advanced biomedical device applications including in-vivo biosensors.

This application note from from Brooks Instrument, highlights requirements and benefits of mass flow controllers and meters in this process. Take a look at the full application note: Accurate, Stable Gas and Liquid Feed Delivery for Titanium Nitride Coatings.

The experts at our process solutions group have a long standing history of working with Brooks Instrument and can help your team determine which equipment is best for you operation. Take a look at the application note and contact our team to see how we can improve your operation.

Brooks Instrument Application: Gas and Liquid Feed Delivery for Titanium Nitride Coatings 1
Brooks Instrument SLA5800 thermal mass flow meter

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